C.W., M.Z. The on-chip laser is combined with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Photon. 12, 1700256 (2018). Article You are using a browser version with limited support for CSS. Science 361, 13581363 (2018). Scaling an EOM down to a small footprint would reduce the device capacitance and thus decrease the switching energy27,28, which is indispensable for all practical applications. 35, 14501455 (2017). Opt. Optica 4, 12511258 (2017). 6a). Compact MZI modulators on thin film Z-cut lithium niobate Guarino, A., Poberaj, G., Rezzonico, D., GeglInnocenti, R. & Gnter, P. Electro-optically tunable microring resonators in lithium niobate. 41, 57005703 (2016). The images or other third party material in this article are included in the articles Creative Commons license, unless indicated otherwise in a credit line to the material. 1c), optimization of the photonic potential via an appropriate pattern of lattice constant (Fig. As a result, a full air cladding would strongly limits the electro-optic coupling, leading to a low efficiency of electro-optic tuning as indicated by the individual black column in Fig. The data sets generated and/or analysed during the current study are available from the corresponding authors on reasonable request. The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. The research was co-authored by Dylan Renaud, Rebecca Cheng, Linbo Shao. Marko Lonar. The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro . Review and perspective on ultrafast wavelength-size electro-optic modulators. Optica 1, 112118 (2014). Photonics 13, 454459 (2019). Nozaki, K. et al. 42.25.p. Nguyen, H. C., Hashimoto, S., Shinkawa, M. & Baba, T. Compact and fast photonic crystal silicon optical modulators. For all the recent advances in integrated lithium niobate photonic circuits from frequency combs to frequency converters and modulators one big component has remained frustratingly difficult to integrate: lasers. OBrien, J. L. Optical quantum computing. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro 8c). The modulators are manufactured upon a commercial x-cut lithium niobate on isolator (LNOI) wafer (NANOLN) with a thin-film LN thickness of 500 nm, which is bonded to a buried silica (SiO 2) layer on a 500-m-thick silicon (Si) substrate. a is the lattice constant. Science 347, 14231424 (2015). On the other hand, the 30-m length of the electrode is overly conservative since it covers the full length of photonic-crystal structure including the injector, mirrors, and the cavity (Figs. Open Access PSI offers ultra-high-speed lithium niobate phase modulators. In the meantime, to ensure continued support, we are displaying the site without styles ISSN 1476-4687 (online) High performance thin-film lithium niobate modulator on a silicon Our scalable modulator devices could provide cost-effective, low-power and ultra-high-speed solutions for next-generation optical communication networks and microwave photonic systems. This is a typical signature of resonance modulation in the sideband-unresolved regime, where the cavity resonance follows adiabatically the electric driving signal in a sinusoidal fashion, resulting in a broadened average transmission spectrum (Fig. 4, 518526 (2010). The extinction ratio can be significantly improved by further optimization of the photonic-crystal mirrors (Fig. Micro-transfer printing of thin-film lithium niobate offers a solution, but suspending large areas of thin films for long interaction lengths and high-Q resonators is challenging, resulting in a low transfer . The inset shows the S11 reflection scattering parameter for both devices. Hybrid silicon photonic-lithium niobate electro-optic MachZehnder modulator beyond 100 GHz. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. Topics: B. Provided by the Springer Nature SharedIt content-sharing initiative. Wolf, S. et al. Figure6d shows an example. A second exposure is then performed to define the waveguide structure, which is partially etched by 150nm with the same process. Velocity matching can be achieved with an oxide thickness of about 4,700nm. C.W., M.Z., X.C., P.W. Here, we make an important step towards miniaturizing functional components on this platform, reporting high-speed LN electro-optic modulators, based upon photonic crystal nanobeam resonators. Wang, C., Zhang, M., Stern, B., Lipson, M. & Lonar, M. Nanophotonic lithium niobate electro-optic modulators. To characterize the performance of high-speed modulation, the majority of the modulated light output was amplified by an erbium-doped fiber amplifier to boost the power, passed through a bandpass filter to remove the amplifier noise, and was then detected by a high-speed detector (New Focus 1024). a Schematic of half of the cross-section of the EOM structure. Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. Science 358, 630632 (2017). Thin-film lithium niobate (LN) has recently emerged as a strong contender owing to its high intrinsic electro-optic (EO) efficiency, industry-proven performance, robustness, and, importantly, the rapid development of scalable fabrication techniques. Liu, J. et al. Harnessing plasma absorption in silicon MOS ring modulators, Resonant plasmonic micro-racetrack modulators with high bandwidth and high temperature tolerance, Photonic van der Waals integration from 2D materials to 3D nanomembranes, A power-efficient integrated lithium niobate electro-optic comb generator. Lithium Niobate Modulator - Agiltron Inc. and S.C. carried out the device characterization. Witmer, J. D. et al. 8b), which, however, might sacrifice the optical Q due to metallic losses. Q.L. Lu, H. et al. On-chip generation of high-dimensional entangled quantum states and their coherent control. has protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. Opt. Extended Data Fig. Lithium niobate modulator | Laser Focus World b Same as a but with a modulation frequency of 2.0GHz. The key modulation waveguide structure is a field-enhanced slot waveguide formed by embedding silicon nanowires in a thin-film lithium niobate (LN), which is different from the previously . A 100, 043811 (2019). 1e). ADS Jian, J. et al. The demonstrated bit rate is currently limited by our PRBS generator (Agilent 70843B) which has a maximum bit rate of 12Gbs1. In most cases, lasers are stand-alone devices, external to the modulators, making the whole system more expensive and less stable and scalable. Light Sci. 8, 701705 (2014). With these devices, we are able to realize efficient driving of the optical mode in both adiabatic sideband-unresolved and non-adiabatic sideband-resolved regimes, and to observe the transition in between. B. Attojoule optoelectronics for low-energy information processing and communications. M.Z. Cai, L. et al. Rev. Lithium niobate etching is not required for making the hybrid optical waveguides. Laser Photonics Rev. Laser. Integrated Electro-Optic Modulator in Z-Cut Lithium Niobate Thin Film Nature thanks M. Hochberg and the other anonymous reviewer(s) for their contribution to the peer review of this work. Res. To obtain and M.B. We achieve this by engineering the microwave and photonic circuits to achieve high electro-optical efficiencies, ultra-low optical losses and group-velocity matching simultaneously. Nature 546, 622626 (2017). High-speed Pockels modulation and second-order nonlinearities are key components in optical systems, but CMOS-compatible platforms like silicon and silicon nitride lack these capabilities. Electro-optic modulation in slotted resonant photonic crystal heterostructures. Miller, D. A. For microwave simulations, the electric-field values are obtained when a voltage of 1V is applied across the two electrodes. IEEE 94, 952985 (2006). Opt. Rao, A. et al. PubMed Central Opt. For example, LNOI phase modulators with relatively low P.W. Chen, L., Wood, M. G. & Reano, R. M. 12.5 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes. The modulators have an SMA RF input, which is directly compatible with . Opt. fabricated the device. 1e) to achieve a critical coupling. To obtain Recently, heterogeneously integrated silicon and lithium niobate (Si/LN) optical modulators have demonstrated attractive overall performance in terms of optical loss, drive voltage, and modulation bandwidth. 101, 151117 (2012). The blue column shows another design with broader bandwidth and enhanced electro-optic coupling. Lett. To show the electro-optic tuning property, we applied a DC voltage to the chip and monitored the cavity transmission spectrum of the \({\mathrm{{TE}}}_{01}^{0}\) mode. Figure7a shows the electro-optic modulation response of the device (blue curve), which exhibits a 3-dB modulation bandwidth up to around 17.5GHz. Lithium niobate photonic-crystal electro-optic modulator Device fabrication is performed at the Harvard University Center for Nanoscale Systems, a member of the National Nanotechnology Coordinated Infrastructure Network, which is supported by the NSF under ECCS award no. Shambat, G. et al. and JavaScript. We used two cascaded travelling wave phase modulators for spatiotemporal modulation and a racetrack resonator as a wavelength filter to suppress the sidebands of the reverse propagating . 20, 150157 (2014). The insertion loss from the on-chip coupling waveguide to the photonic-crystal cavity is measured to be around 2.2dB, calibrated by subtracting the facet coupling and circulator transmission loss. This series of Lithium Niobate fiberoptic Modulators is designed for laboratory test use. Figure5b shows a clear linear dependence of the induced resonance wavelength shift on the applied voltage, from which we obtained a tuning slope of 16.0pmV1 (corresponding to a frequency tuning slope of 1.98GHzV1), close to our design. 13, 1800228 (2019). Google Scholar. @article{Hu2023DynamicallyTS, title={Dynamically tunable single-/dual-band of the graphene absorber with a resonant asymmetric grating based on lithium niobate on insulator}, author={Jinhua Hu and Lili Sun and Lei Li and Xiuhong Liu and Danping Ren and Jijun Zhao}, journal={Optics Communications}, year={2023} } VOA variable optical attenuator, MZI MachZehnder interferometer, EDFA erbium-doped fiber amplifier, BPF bandpass filter, MNA, microwave network analyzer, PRBS pseudo-random binary sequence source. Ultra-high-linearity integrated lithium niobate electro-optic modulators 1 Half-wave voltages of devices with different active lengths. and JavaScript. All-plasmonic MachZehnder modulator enabling optical high-speed communication at the microscale. The metal electrode layer (10nm Ti/500 nm Au) was deposited by an electron-beam evaporator and the electrode structure was formed by a lift-off process via ZEP-520A. Such flexibility allows us to observe direct transition between the adiabatic driving regime and the non-adiabatic regime simply by continuously sweeping the modulation frequency to across the cavity linewidth. 6, 488503 (2012). a Recorded scattering parameter S21 for two devices with optical Q of ~14,000 (blue curve) and ~20,000 (orange curve), respectively. As such, the photonic-crystal mirror on the right side of the defect cavity is designed to be of 100% reflection, while that on the left side has decreased number of holes (Fig. The green region indicates the electrode that can be shrunk to in the future design. For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. 1541959. Koeber, S. et al. Express 20, 2246522474 (2012). Nature 507, 341345 (2014). Wang, C. et al. Harvards Office of Technology Developmenthas protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. By placing the metal electrodes on top and bottom of the waveguide rather than the usual lateral configuration, the electric field is fully overlapping the optical field. As an example application, we demonstrate electro-optic switching of non-return-to-zero (NRZ) signal at a rate of 11Gbs1, with a switching energy as low as 22fJ per bit that is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. ISSN 2041-1723 (online). A variety of approaches have been employed for electro-optic modulation, such as carrier plasma dispersion6,7, electro-absorption8,9, and Pockels effect1,10, the latter of which is particularly interesting since the Pockels effect offers an ultrafast and pure refractive-index modulation over an extremely broad optical spectrum while without introducing extra loss. The modulator utilizes spiral-shaped optical waveguides on Z-cut lithium niobate and the preeminent electro-optic effect which is applied using top and bottom electrodes. Gigahertz speed operation of epsilon-near-zero silicon photonic modulators. Phys. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. are involved in developing lithium niobate technologies at HyperLight Corporation. Low-loss plasmon-assisted electro-optic modulator. This mode, however, has only negligible perturbation to the dielectric mode due to distinctive spatial symmetry, thus not affecting the quality of the defect cavity mode. Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. Integrating high-performance plug-and-play lasers would significantly reduce the cost, complexity, and power consumption of future communication systems, said Amirhassan Shams-Ansari, a graduate student at SEAS and first author of the study. Photon. Consequently, the transmission spectrum transforms into a multi-resonance spectrum (Fig. DOI: 10.1364/OL.426083 Abstract L V cm, and the 3 dB electro-optical bandwidth is about 55 GHz. Opt. Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. Input requirements, test setups, and mounting instructions will be covered. 03 April 2023, Nature Communications The modulator is designed to be used in externally modulated fiberoptic transmitters for supertrunking of digitized cable-TV signals as well as for long-haul transmission of OC-192 data. Rao, A. et al. CAS Light Sci. 3). View Spotlight analysis of the #OPG_JOSA_B paper Spiral waveguide Bragg grating modulator on thin-film Z-cut lithium niobate http://ow.ly/NsJS50NVr0m Spotlight . 42.70.a. The elliptical hole has dimensions of hx=270nm and hy=490nm, and a fully etched depth of 300nm. As shown in Fig. Express 23, 2274622752 (2015). The blue open circles show the dielectric and air bands. Photon. Therefore, we expect our devices to have much higher energy efficiency, as will be shown in the following sections. Google Scholar. Lithium niobate piezo-optomechanical crystals. Weigel, P. O. et al. 9, 525528 (2015). 35, 346396 (2017). The current generation of lithium niobate modulators are bulky, expensive, limited in bandwidth and require high drive voltages, and thus are unable to reach the full potential of the material. Chirp in Mach-Zehnder Lithium Niobate Modulators - Optiwave Lu, H. et al. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. b Detailed transmission spectrum of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) at a wavelength of 1554.47nm, with the experimental data shown in blue and the theoretical fitting shown in red. Aoki, M. et al. 6, 488503 (2012). Optica 5, 233236 (2018). As shown in Fig. 1a). High-performance hybrid silicon and lithium niobate Mach Zehnder modulators for 100 Gbit s1 and beyond. Thank you for visiting nature.com. Opt. https://doi.org/10.1038/s41586-018-0551-y, DOI: https://doi.org/10.1038/s41586-018-0551-y. Hybrid Silicon and Lithium Niobate Modulator Abstract: Hybrid Lithium Niobate (LN) and Silicon photonic (SiPh) integration platform has emerged as a promising candidate to combine the scalability of silicon photonics with the excellent modulation performance of LN. B 97, 104105 (2018). The region highlighted in red is the electrode used to drive the photonic-crystal nanoresonator. 16, 185191 (2010). and A.S. fabricated the devices. High-speed electro-optic modulation underlies many important applications ranging from optical communication1, microwave photonics2, computing3, frequency metrology4 to quantum photonics5. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. A hybrid waveguide with a lithium niobate thin film bonded on a silicon wire is employed. Introduction to Lithium Niobate - Academic Accelerator Folded thin-film lithium niobate modulator based on a poled Mach https://doi.org/10.1038/s41586-018-0551-y, Complementary Metal Oxide Semiconductor (CMOS). We believe this is the first LN EOM ever reported with such combined device characteristics and modulation performance. volume11, Articlenumber:4123 (2020) a, b, Schematics of the cross-sections of thin-film (a) and conventional (b) LN modulators. Thorlabs free-space electro-optic (EO) amplitude and phase lithium niobate modulators combine our experience with crystal growth and electro-optic materials. Open Access Thank you for visiting nature.com. Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. Express 26, 2372823739 (2018). For the application of high-speed electro-optic switching, our simulations show that the electrode-waveguide spacing can be decreased to 1.5m for an optical Q of ~5000 (corresponding to a modulation bandwidth of ~45GHz), which will improve the modulation efficiency to 2.38GHzV1 (simulation details in Methods). 8c) due to the decrease of optical mode confinement. Among various device geometries, photonic-crystal nanoresonators are particularly beneficial in this regard, given their exceptional capability of controlling light confinement and lightmatter interactions on the sub-wavelength scale. Nat. Opt. J. Lightwave Technol. The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. High-performance and linear thin-film lithium niobate MachZehnder modulators on silicon up to 50GHz. IEEE Photon. Google Scholar. Optical waveguides are made of rib etched lithium niobate waveguides with bottom silicon oxide cladding, while SU8 polymer covers the top and sides of the rib waveguides. http://eospace.com/pdf/EOSPACEbriefProductInfo2017.pdf, 40GHz or 40Gb/s Lithium Niobate Modulators. Abstract. Herein, we review the progress in microstructure and domain. Electro-optic modulation enables arbitrary modulation of cavity resonance within the bandwidth allowed by the driving circuit. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Loncar and his team used small but powerful distributed feedback lasers for their integrated chip.
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